New procedures to the cheap production from piezo layers for sensors and micro actors
project manager: Prof. Dr. M. Es-Souni, Institut of Materials and Surface Technology,Fachbereich Maschinenwesen, FH Kiel
project acronym: SCHIPIE
duration: 2005-2008
allocation: Field 26 Werkstofftechnik (WERK)
project partner: Vishay BC-Components Beyschlag GmbH, Heide (Ansprechpartner: Herr Dipl. Ing. Wolfgang Werner, Leiter F&E Abteilung) EGE-Elektronik, Gettorf (Ansprechpartner Dr. Eckart Hiss,Geschäftsführer) Dräger-Werke AG, Lübeck (Ansprechpartner Prof. Dr. Meyer Leiter der F&E Unit und Dr. Dicks Projektleiter)Dr. Paul Lohmann Chemie, Emmerthal (Ansprechpartner Herr Dipl. Chem. Ing. Stefan Merkel) Institut für Technische Informatik, Labor für Sensorentwicklung, Fachbereich Elektrotechnik, FH Kiel (Prof. Dr. Gerd Stange) Technische Fakultät der Christian-Albrechts-Universität zu Kiel, Lehrstuhl für Materialverbunde (Prof. Dr. Franz Faupel) Technische Universität Kaunas, Center for Microsystems- and Nanotechnology, Litauen (Prof. Dr. Valentinas Snitka)
Summary and purposes
The project has to the purpose:
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Optimization of "one" in the institute of material technology Kiel FH developed procedure to the cheap production of piezoelectric layers with thicknesses in the area from 3 to 20 m
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to produce "the proof of the talent of the talent of the layers for applications in sensors .
The production method is based on a powder-Sol-gel- procedure, with the substrate with more differently geometry can be coated. The procedure became in preattempts to Spin coating of piezoelectric layers on lead zirconium titanat (PZT) base developed and patented. Furthermore the Sol-gel-powder-procedure should go for layers of higher quality on another in the institute developed procedure expanded by polymer PZT composite.
As a result the production conditions should be optimized in that way that fine, crack- free and free of pore microstructures with reproduceable, for industrial application suitable dielectric and to piezoelectric qualities can be achieved. Then in narrow collaboration with the project partners (Beyschlag GmbH, EGE electronics) the layers shall exemplarily be used for the conception and production from piezo sensors and m ikroactuators (Dräger-Werke AG).
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